Nanometrology and Standardization
Course: Nanometrology and Standardization
Code: 3ФЕИТ08018
ECTS points: 6 ECTS
Number of classes per week: 3+0+0+3
Lecturer: Prof. Dr. Hristina Spasevska
Course Goals (acquired competencies): Gain knowledge in the field of metrology in nanotechnology, characterization of nanostructures and standardization for the purpose of industrial production of nano products.
Course Syllabus: Introduction to metrology of micro and nanotechnologies.Terminology and nomenclature in nanotechnologies. Metrology techniques for measurement of nano values and limiting factors. Measurement of one-dimensional, two-dimensional and three-dimensional structures. Uncertainty in measurements of nano dimensions. Metrology principles for obtaining nano-industrial products. Standards in nanotechnologies, core areas of standardization in nanotechnologies.
Literature:
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Required Literature |
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No. |
Author |
Title |
Publisher |
Year |
|
1 |
Richard Leach |
Fundamental Principles of Engineering Nanometrology |
William Andrew |
2009 |
|
2 |
Vladimir Murashov, John Howard |
Nanotechnology Standards |
Springer |
2011 |
|
3 |
Günter Wilkening, Ludger Koenders |
Nanoscale Calibration Standards and Methods |
John Wiley & Sons |
2006 |
|
Additional Literature |
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|
No. |
Author |
Title |
Publisher |
Year |
|
1 |
David J. Whitehouse |
Handbook of Surface and Nanometrology |
Taylor & Francis |
2010 |
|
2 |
Wei-Hong Zhong |
Nanoscience and Nanomaterials: Synthesis, Manufacturing and Industry Impacts |
DEStech Publications, Inc |
2012 |
