From Microelectronics to Nanoelectronics

Course Title: From Microelectronics to Nanoelectronics

Code: 3ФЕИТ05012A

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Prof. D-r Katerina Raleva, PhD

Course Goals (acquired competencies): The course offers a thorough knowledge on micro- and nano-technologies; ability to understand the limits of electronic design with scaling of CMOS technology and the new transistor architectures. The student will be able to apply the new nanoscale transistors and memories in the design of electronic circuits and systems.

Course Syllabus: Introduction to microelectronics fabrication (lithography, diffusion, etching, ion implantation, metalization, packaging). Theory of MOS capacitor. Physics of MOSFET - long channel and short channel devices. CMOS technology. Scaling MOSFET and Moore's Law.  Limits of CMOS scaling- bulk CMOS ans SOI CMOS. New transistor architectures: fully-depleted SOI, dual-gate, FinFET, gate-all-around transistors. Semiconductor memories (SRAM, DRAM, flash). Integration of technologies. BiCMOS-process, integrated optoelectronics. Introductory concept of nanotechnology. Nanomaterials and nanostructures fabrication techniques  (top-down, bottom-up, self-assembly). Nanoelectronics: single electron transistor, nanowire and carbon nanotube transistors, ReRAM, few electron memories.

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