Microelectronics and microsystems
Course title: Microelectronics and microsystems
Code: FEIT05L019
Number of credits (ECTS): 6
Weekly number of classes: 3+1+1+0
Prerequisite for enrollment of the subject: Electronics 1 or Electronics
Course goals/Competences: Knowledge of microelectronic technologies and their application in microelectronic devices and circuits. Applying CAD tools in microelectronic technology and layout. Designing simple structures.
Total available number of classes: 180
Curriculum: Introduction: ITRD road of microelectronics development. Monocrystals, photolithography; diffusion, epitaxy, oxidation, ion implantation, vapor deposition, metallization, processes simulation, packaging. Integrated circuits structures: sheet resistance, Irvin's curves, pn-junction, Lawrence-Warner diagrams, MOS-structures, BJT, passive elements, Layout CAD systems. Hybrid IC, MEMS and microsystems, processes integration, examples of MEMS strustures, organic semiconductors
Literature:
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Literature |
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Compulsory literature |
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No. |
Author |
Title |
Publisher |
Year |
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1 |
Richard C. Jaeger |
Introduction to microelectronic fabrication, 2nd еd. |
Prentice Hall |
2002 |
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2 |
Томислав Џеков |
Микроелектроника |
УКИМ |
1986 |
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3 |
J. Kjosev |
A collection of solved examples Microelectronics |
FEIT (internal) |
1989 |
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Further literature |
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No. |
Author |
Title |
Publisher |
Year |
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1 |
Stephen D. Senturia |
Microsystem design |
Kluwer academic pub. |
2001 |
|
2 |
J.Baker |
CMOS: Circuit design, layout and simulation, 2nd ed |
Wiley-IEEE |
2005 |
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3 |
Various authors |
Internet materials and simulators |
Internet |
Current |
