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Microelectronics and Microsystems

Course title: Microelectronics and Microsystems

Code: 3ФЕИТ05Л024

Number of credits (ECTS): 6

Weekly number of classes: 3+1+1+0

Prerequisite for enrollment of the subject: None

Course Goals (acquired competencies): Has deeper knowledge of microelectronic circuits engineering. Understands microelectronic technologies. Applies basic CAD tools  for integrated circuits design and has skills for practical design of simple microelectronic structures.

Total available number of classes: 180

Course Syllabus: Introduction to microelectronic technologies  – ITRS. Monocrystal, photolithography; diffusion, epitaxy, oxidation, ion-implantation, metalization, technology simulation, packaging. IC structures: sheet resistance, Irvin diagrams, pn-junction, Lorens-Vorner Diagrams, MOS-structures and characteristics, bipolar transistors and characteristics. IC layout CAD systems. Hybrid IC.; MEMS  and microsystems, processes integration, MEMS examples. Introduction to organic semiconductors.

Literature:

Additional Literature

No.

Author

Title

Publisher

Year

1

Richard C. Jaeger

Introduction to microelectronic fabrication, 2nd еd

Prentice Hall

2001

2

Stephen D. Senturia

Microsystem design

Kluwer academic pub.

2001