Microelectronics and Microsystems
Course title: Microelectronics and Microsystems
Code: 3ФЕИТ05Л024
Number of credits (ECTS): 6
Weekly number of classes: 3+1+1+0
Prerequisite for enrollment of the subject: None
Course Goals (acquired competencies): Has deeper knowledge of microelectronic circuits engineering. Understands microelectronic technologies. Applies basic CAD tools for integrated circuits design and has skills for practical design of simple microelectronic structures.
Total available number of classes: 180
Course Syllabus: Introduction to microelectronic technologies – ITRS. Monocrystal, photolithography; diffusion, epitaxy, oxidation, ion-implantation, metalization, technology simulation, packaging. IC structures: sheet resistance, Irvin diagrams, pn-junction, Lorens-Vorner Diagrams, MOS-structures and characteristics, bipolar transistors and characteristics. IC layout CAD systems. Hybrid IC.; MEMS and microsystems, processes integration, MEMS examples. Introduction to organic semiconductors.
Literature:
Additional Literature |
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No. |
Author |
Title |
Publisher |
Year |
1 |
Richard C. Jaeger |
Introduction to microelectronic fabrication, 2nd еd |
Prentice Hall |
2001 |
2 |
Stephen D. Senturia |
Microsystem design |
Kluwer academic pub. |
2001 |